Design of a micromanipulation system for high temperature operation in an environmental scanning electron microscope (ESEM)

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ژورنال

عنوان ژورنال: Journal of Micromechanics and Microengineering

سال: 2006

ISSN: 0960-1317,1361-6439

DOI: 10.1088/0960-1317/17/1/014